Investigation of opto-electronical properties of DC magnetron sputtered ZnO:Al films with respect to the layer thickness, annealing temperature and resistance inhomogeneity

Nowak, Regina-Elisabeth (2011) Investigation of opto-electronical properties of DC magnetron sputtered ZnO:Al films with respect to the layer thickness, annealing temperature and resistance inhomogeneity. Masters, Universität Oldenburg.

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Abstract

Investigation of opto-electronical properties of DC magnetron sputtered ZnO:Al films with respect to the layer thickness, annealing temperature and resistance inhomogeneity

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Untersuchung der opto-elektronischen Eigenschaften von DC gesputterten ZnO:Al-Schichten im Hinblick auf die Schichtdicke, Nachbehandlungstemperatur und Widerstandsinhomogenität

Item Type: Thesis (Masters)
Uncontrolled Keywords: [Keine Schlagwörter von Autor/in vergeben.]
Controlled Keywords: Physik
Subjects: Science and mathematics > Physics
Divisions: Faculty of Mathematics and Science
Date Deposited: 17 Jan 2013 14:27
Last Modified: 08 Jul 2013 13:04
URI: http://oops.uni-oldenburg.de/id/eprint/1218
URN: urn:nbn:de:gbv:715-oops-12971
DOI:

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